High Surface Area to Volume Ratio 3D Nanoporous Nb2O5 for Enhanced Humidity Sensing

Sensors based on metal oxide platforms offer ease of device fabrication and simple sensing operation. As a metal oxide platform, highly nanoporous niobium oxide (Nb 2 O 5 ) films consisting of unique three-dimensional vein-like structures can be efficiently used for developing humidity sensors. In t...

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Veröffentlicht in:Journal of electronic materials 2019-06, Vol.48 (6), p.3805-3815
Hauptverfasser: Abdul Rani, Rozina, Zoolfakar, Ahmad Sabirin, Mohamad Ryeeshyam, Mohamad Fauzee, Ismail, Ahmad Syakirin, Mamat, Mohamad Hafiz, Alrokayan, Salman, Khan, Haseeb, Kalantar-zadeh, Kourosh, Mahmood, Mohamad Rusop
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container_end_page 3815
container_issue 6
container_start_page 3805
container_title Journal of electronic materials
container_volume 48
creator Abdul Rani, Rozina
Zoolfakar, Ahmad Sabirin
Mohamad Ryeeshyam, Mohamad Fauzee
Ismail, Ahmad Syakirin
Mamat, Mohamad Hafiz
Alrokayan, Salman
Khan, Haseeb
Kalantar-zadeh, Kourosh
Mahmood, Mohamad Rusop
description Sensors based on metal oxide platforms offer ease of device fabrication and simple sensing operation. As a metal oxide platform, highly nanoporous niobium oxide (Nb 2 O 5 ) films consisting of unique three-dimensional vein-like structures can be efficiently used for developing humidity sensors. In this work, nanoporous Nb 2 O 5 films (with different thicknesses of ∼ 1  μ m, ∼ 2  μ m, and ∼ 4  μ m) were prepared by anodization of niobium foil for 30 min, 60 min, and 120 min. Electron, x-ray, atomic, and vibrational microscopies and spectroscopies were used for characterizing the morphological and structural properties of the Nb 2 O 5 films. The analysis revealed that the nanoporous Nb 2 O 5 exhibited hierarchical vein-like structures with orthorhombic crystalline orientation, and their surface roughness showed a proportional increase with the anodization duration. Metal–semiconductor–metal humidity sensors based on nanoporous Nb 2 O 5 with platinum electrodes were tested in a humidity chamber under conditions of 40% to 90% relative humidity (RH) and different bias voltages. According to the obtained results, the ∼ 4- μ m-thick nanoporous Nb 2 O 5 presented the highest relative sensitivity of 216.5 under a bias voltage of 5 V, taking advantage of its extremely porous structure. These sensors provide high surface area to volume ratio, leading to highly effective affinity and interactions between surface-active sites and water molecules.
doi_str_mv 10.1007/s11664-019-07126-5
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As a metal oxide platform, highly nanoporous niobium oxide (Nb 2 O 5 ) films consisting of unique three-dimensional vein-like structures can be efficiently used for developing humidity sensors. In this work, nanoporous Nb 2 O 5 films (with different thicknesses of ∼ 1  μ m, ∼ 2  μ m, and ∼ 4  μ m) were prepared by anodization of niobium foil for 30 min, 60 min, and 120 min. Electron, x-ray, atomic, and vibrational microscopies and spectroscopies were used for characterizing the morphological and structural properties of the Nb 2 O 5 films. The analysis revealed that the nanoporous Nb 2 O 5 exhibited hierarchical vein-like structures with orthorhombic crystalline orientation, and their surface roughness showed a proportional increase with the anodization duration. Metal–semiconductor–metal humidity sensors based on nanoporous Nb 2 O 5 with platinum electrodes were tested in a humidity chamber under conditions of 40% to 90% relative humidity (RH) and different bias voltages. According to the obtained results, the ∼ 4- μ m-thick nanoporous Nb 2 O 5 presented the highest relative sensitivity of 216.5 under a bias voltage of 5 V, taking advantage of its extremely porous structure. 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As a metal oxide platform, highly nanoporous niobium oxide (Nb 2 O 5 ) films consisting of unique three-dimensional vein-like structures can be efficiently used for developing humidity sensors. In this work, nanoporous Nb 2 O 5 films (with different thicknesses of ∼ 1  μ m, ∼ 2  μ m, and ∼ 4  μ m) were prepared by anodization of niobium foil for 30 min, 60 min, and 120 min. Electron, x-ray, atomic, and vibrational microscopies and spectroscopies were used for characterizing the morphological and structural properties of the Nb 2 O 5 films. The analysis revealed that the nanoporous Nb 2 O 5 exhibited hierarchical vein-like structures with orthorhombic crystalline orientation, and their surface roughness showed a proportional increase with the anodization duration. Metal–semiconductor–metal humidity sensors based on nanoporous Nb 2 O 5 with platinum electrodes were tested in a humidity chamber under conditions of 40% to 90% relative humidity (RH) and different bias voltages. 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subjects Bias
Characterization and Evaluation of Materials
Chemistry and Materials Science
Electronics and Microelectronics
Foils
Humidity
Instrumentation
Materials Science
Metal oxides
Niobium oxides
Optical and Electronic Materials
Platinum
Relative humidity
Sensors
Solid State Physics
Structural hierarchy
Surface area
Surface roughness
Thickness
Veins
Water chemistry
title High Surface Area to Volume Ratio 3D Nanoporous Nb2O5 for Enhanced Humidity Sensing
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