Particulate reduction in PLD-grown crystalline films via bi-directional target irradiation

We present a novel variation of the pulsed laser deposition (PLD) technique, aimed at reducing the number of particulates produced and consequently the linear propagation loss observed in the resulting crystal waveguides. The approach relies upon configuring the system to effectively provide bi-dire...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2019-02, Vol.125 (2), p.1-8, Article 152
Hauptverfasser:	Prentice, Jake J., Grant-Jacob, James A., Kurilchik, Sergey V., Mackenzie, Jacob I., Eason, Robert W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablation Applied physics Characterization and Evaluation of Materials Condensed Matter Physics Cones Crystal growth Incidence angle Laser beams Machines Manufacturing Materials science Nanotechnology Optical and Electronic Materials Particulates Physics Physics and Astronomy Processes Pulsed laser deposition Pulsed lasers Reduction Substrates Surface roughness Surfaces and Interfaces Thin Films Wave propagation Waveguides
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