Structural and microwave characterization of BaSrTiO^sub 3^ thin films deposited on semi-insulating silicon carbide

Thin ferroelectric barium strontium titanate (BST) layers of high structure quality have been grown for the first time directly on semi-insulating silicon carbide substrates by RF magnetron sputtering of a ceramic target. The structural and microwave properties of the films were substantially improv...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2018-11, Vol.57 (11), p.11UE02
Hauptverfasser:	Tumarkin, Andrey, Gagarin, Alexander, Odinets, Andrey, Zlygostov, Michail, Sapego, Evgeny, Kotelnikov, Igor
Format:	Artikel
Sprache:	eng
Schlagworte:	Barium strontium titanates Crystal structure Dielectric loss Dielectric properties Electrical properties Ferroelectric materials Ferroelectricity Magnetic properties Magnetron sputtering Microwaves Silicon carbide Silicon substrates Structural analysis Thin films
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