Band alignment of indium–gallium–zinc oxide/β-Ga^sub 2^O^sub 3^ (201) heterojunction determined by angle-resolved X-ray photoelectron spectroscopy
The energy band offsets between indium–gallium–zinc oxide (IGZO) and β-Ga2O3 were examined by angle-resolved X-ray photoelectron spectroscopy (AR-XPS). The Ga 2p spectra from the heterojunction contributed by the upper IGZO film and the β-Ga2O3 substrate were deconvoluted into two sub-peaks with the...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2018-10, Vol.57 (10), p.100312 |
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Hauptverfasser: | , , , , , , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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