Secondary electron energy distribution from insulators in helium ion microscope

Secondary electron emission generated by the impact of positive ions from insulators is generally strongly retarded due unavoidable positive charging of the target hindering the reliable characterization of the materials. Special measurement procedure utilizing a distant single-ion impact is develop...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Anikeva, A. E., Petrov, Yu. V., Vyvenko, O. F.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Charging Electron emission Electron energy distribution Electrons Helium ions Insulators Ion impact Platinum Positive ions Silicon dioxide Silicon nitride
Online-Zugang:	Volltext
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