Selective UV–O^sub 3^ treatment for indium zinc oxide thin film transistors with solution-based multiple active layer

In this study, a method to control the electrical performance of solution-based indium zinc oxide (IZO) thin film transistors (TFTs) is proposed by ultraviolet–ozone (UV–O3) treatment on the selective layer during multiple IZO active layer depositions. The IZO film is composed of triple layers forme...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2018-06, Vol.57 (6), p.06KB01
Hauptverfasser:	Kim, Yu-Jung, Jeong, Jun-Kyo, Park, Jung-Hyun, Jeong, Byung-Jun, Lee, Hi-Deok, Lee, Ga-Won
Format:	Artikel
Sprache:	eng
Schlagworte:	Indium Photoelectrons Semiconductor devices Spin coating Thin film transistors Thin films Transistors Ultraviolet radiation Zinc oxide Zinc oxides
Online-Zugang:	Volltext
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