Ultra-thin titanium nitride films for refractory spectral selectivity [Invited]

We demonstrate a selectively emitting optical Fabry-Pérot resonator based on a few-nm-thin continuous metallic titanium nitride film, separated by a dielectric spacer, which exhibits excellent stability at 1070 K against chemical degradation, thin-film instabilities and melting point depression. The...

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Veröffentlicht in:Optical materials express 2018-12, Vol.8 (12), p.3717
Hauptverfasser: Roberts, Alexander S., Chirumamilla, Manohar, Wang, Deyong, An, Liqiong, Pedersen, Kjeld, Mortensen, N. Asger, Bozhevolnyi, Sergey I.
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Sprache:eng
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Zusammenfassung:We demonstrate a selectively emitting optical Fabry-Pérot resonator based on a few-nm-thin continuous metallic titanium nitride film, separated by a dielectric spacer, which exhibits excellent stability at 1070 K against chemical degradation, thin-film instabilities and melting point depression. The structure paves the way to the design and fabrication of refractory thermal emitters using the well-established processes known from the field of multilayer and rugate optical filters. We demonstrate that a few-nanometer thick films of titanium nitride can be stable under operation at temperatures exceeding 1070 K. This type of selective emitter provides a means towards near-infrared thermal emission that could potentially be tailored to the accuracy level known from rugate optical filters.
ISSN:2159-3930
2159-3930
DOI:10.1364/OME.8.003717