A ternary–3D analysis of the optical properties of amorphous hydrogenated silicon–rich carbide

We introduce a novel method for the analysis of the dependence of the optical parameters of Hydrogenated Silicon–rich Carbide (SRC:H) on the alloy composition by using a ternary–3D diagram. The SRC:H samples were fabricated using the very high frequency (VHF) plasma enhanced chemical vapour depositi...

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Veröffentlicht in:	Materials chemistry and physics 2019-01, Vol.221, p.301-310
Hauptverfasser:	Summonte, C., Gaspari, F., Quaranta, S., Rizzoli, R., Centurioni, E., Canino, M., Polliotti, A.Y., Bianconi, M., Desalvo, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Alloys Chemical vapor deposition Composition Data rotation Dependence Formulations Mathematical models Optical properties Organic chemistry Parameters PECVD Plasma enhanced chemical vapor deposition Reflectance Refractivity Silicon carbide Silicon rich carbide Spectrophotometry Spectrum analysis Very high frequencies
Online-Zugang:	Volltext
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