Some geometrical aspects of diffracted waves formation on a reconstructed crystal face at RHEED

•The geometrical parameters 1/Sdom and 1/Scoh determine the type of the dependence between the intensity of reflections (I) and the degree of surface coverage by reconstruction domains (Qα); 1/Sdom and 1/Scoh—number of domains and coherence areas per area unit, respectively.•1/Sdom 1/Scoh—mixed functional dependence (I∝const·Qα+Qα2).•The fulfillment of the RHEED rocking curves additivity condition is a trait of realizing the linear dependence between specular-beam intensity and Qα. The evolution of RHEED reflections intensity during reconstruction transitions characterizes (often implicitly) reconstructed surface state change peculiarities. The approaches of a correct RHEED data interpretation, aimed at obtaining information about reconstruction transitions kinetics, are considered in the present work. In particular, the nature of RHEED reflections formation, depending on such parameters as the average size of reconstruction domains and number of such domains per area unit, is analyzed within the kinematic approximation of the diffraction theory. This geometrical description, in complex with the JMAK model, is a convenient and effective (productive) way of analyzing reconstruction transitions mechanisms and parameters. The transformation of the functional dependence between the measured values (RHEED pattern reflections intensity) and the degree of surface coverage by reconstruction domains, at a change of these domains average size and distribution density, is shown. The correctness of theoretical conclusions is confirmed by the obtained experimental results, and it well agrees to the known literature data. This work provides the community with a useful framework for such type of theoretical studies.