Investigation of degradation pathways of poly(semiperfluoroalkyl methacrylate) thin films induced by electron‐beam irradiation

ABSTRACT In this article, we report the results of high‐energy electron beam (e‐beam) irradiation of polymer thin films made of poly(semiperfluoroalkyl methacrylate)s (PRFMAs) and propose plausible chemical reactions that may cause their solubility to change in fluorous liquids. It was observed that...

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Veröffentlicht in:	Journal of polymer science. Part A, Polymer chemistry Polymer chemistry, 2018-12, Vol.56 (23), p.2672-2680
Hauptverfasser:	Jung, Seok‐Heon, Chuluunbandi, Khajidkhand, Kim, Youngtae, Son, Jongchan, Oh, Hyun‐Taek, Lee, Jin Hyun, Lee, Jin‐Kyun, Beom‐Hoan, O
Format:	Artikel
Sprache:	eng
Schlagworte:	Chain scission Chemical reactions Crosslinking Decomposition reactions Electron beam lithography electron‐induced chemical reaction Fluorination fluoropolymer fluorous solvents Fourier transforms Free radicals Hypotheses Irradiation Mass spectrometry Nanoindentation Organic chemistry poly(semiperfluoroalkyl methacrylate)s Polymer films Polymers Solubility Thin films X ray spectra
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