Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion sourcea
We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in E...
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| Veröffentlicht in: | Review of scientific instruments 2014-02, Vol.85 (2) |
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| creator | Kumakura Sho Kurisu Yosuke Kimura Daiju Yano Keisuke Imai Youta Sato Fuminobu Kato Yushi Iida Toshiyuki |
| description | We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in ECRIS plasma at extremely low pressures (10−3–10−5 Pa) by using cylindrical Langmuir probe. From the result, it is found that the EEDF correlates with the electron density and the temperature from the conventional probe analysis. In addition, we confirm that the tail of EEDF spreads to high energy region as the pressure rises and that there are electrons with high energy in ECR multicharged ion source plasma. The effective temperature estimated from the experimentally obtained EEDF is larger than the electron temperature obtained from the conventional method. |
| doi_str_mv | 10.1063/1.4829738 |
| format | Article |
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High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in ECRIS plasma at extremely low pressures (10−3–10−5 Pa) by using cylindrical Langmuir probe. From the result, it is found that the EEDF correlates with the electron density and the temperature from the conventional probe analysis. In addition, we confirm that the tail of EEDF spreads to high energy region as the pressure rises and that there are electrons with high energy in ECR multicharged ion source plasma. The effective temperature estimated from the experimentally obtained EEDF is larger than the electron temperature obtained from the conventional method.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.4829738</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Cyclotron resonance ; Distribution functions ; Electron cyclotron resonance ; Electron density ; Electron energy ; Electron energy distribution ; Electrons ; Energy ; Energy measurement ; Ion sources ; Ions ; Plasma ; Probe method (forecasting) ; Scientific apparatus & instruments</subject><ispartof>Review of scientific instruments, 2014-02, Vol.85 (2)</ispartof><rights>2013 AIP Publishing LLC.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Kumakura Sho</creatorcontrib><creatorcontrib>Kurisu Yosuke</creatorcontrib><creatorcontrib>Kimura Daiju</creatorcontrib><creatorcontrib>Yano Keisuke</creatorcontrib><creatorcontrib>Imai Youta</creatorcontrib><creatorcontrib>Sato Fuminobu</creatorcontrib><creatorcontrib>Kato Yushi</creatorcontrib><creatorcontrib>Iida Toshiyuki</creatorcontrib><title>Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion sourcea</title><title>Review of scientific instruments</title><description>We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in ECRIS plasma at extremely low pressures (10−3–10−5 Pa) by using cylindrical Langmuir probe. From the result, it is found that the EEDF correlates with the electron density and the temperature from the conventional probe analysis. In addition, we confirm that the tail of EEDF spreads to high energy region as the pressure rises and that there are electrons with high energy in ECR multicharged ion source plasma. The effective temperature estimated from the experimentally obtained EEDF is larger than the electron temperature obtained from the conventional method.</description><subject>Cyclotron resonance</subject><subject>Distribution functions</subject><subject>Electron cyclotron resonance</subject><subject>Electron density</subject><subject>Electron energy</subject><subject>Electron energy distribution</subject><subject>Electrons</subject><subject>Energy</subject><subject>Energy measurement</subject><subject>Ion sources</subject><subject>Ions</subject><subject>Plasma</subject><subject>Probe method (forecasting)</subject><subject>Scientific apparatus & instruments</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNqNjLkOwjAQRC0EEuEo-ANL1AE7zlkjEB9AjxKzBEfBBh9F_p5VBD3T7GjnzRCy4WzHWS72fJeWSVWIckIizsoqLvJETEnEmEjjvEjLOVk41zFUxnlE_LEH6a3RFDTYdqA35bxVTfAKf_eg5WiagQandEtf1jRAn-Af5kYVtn51OcjejM6CM7rWErHQeyUftW0BYYycCVZCvSKze907WH_vkmxPx8vhHOP6O4Dz1w5BjdE14UmVMZHxXPxHfQC7SFKO</recordid><startdate>20140201</startdate><enddate>20140201</enddate><creator>Kumakura Sho</creator><creator>Kurisu Yosuke</creator><creator>Kimura Daiju</creator><creator>Yano Keisuke</creator><creator>Imai Youta</creator><creator>Sato Fuminobu</creator><creator>Kato Yushi</creator><creator>Iida Toshiyuki</creator><general>American Institute of Physics</general><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20140201</creationdate><title>Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion sourcea</title><author>Kumakura Sho ; Kurisu Yosuke ; Kimura Daiju ; Yano Keisuke ; Imai Youta ; Sato Fuminobu ; Kato Yushi ; Iida Toshiyuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-proquest_journals_21295035163</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Cyclotron resonance</topic><topic>Distribution functions</topic><topic>Electron cyclotron resonance</topic><topic>Electron density</topic><topic>Electron energy</topic><topic>Electron energy distribution</topic><topic>Electrons</topic><topic>Energy</topic><topic>Energy measurement</topic><topic>Ion sources</topic><topic>Ions</topic><topic>Plasma</topic><topic>Probe method (forecasting)</topic><topic>Scientific apparatus & instruments</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kumakura Sho</creatorcontrib><creatorcontrib>Kurisu Yosuke</creatorcontrib><creatorcontrib>Kimura Daiju</creatorcontrib><creatorcontrib>Yano Keisuke</creatorcontrib><creatorcontrib>Imai Youta</creatorcontrib><creatorcontrib>Sato Fuminobu</creatorcontrib><creatorcontrib>Kato Yushi</creatorcontrib><creatorcontrib>Iida Toshiyuki</creatorcontrib><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kumakura Sho</au><au>Kurisu Yosuke</au><au>Kimura Daiju</au><au>Yano Keisuke</au><au>Imai Youta</au><au>Sato Fuminobu</au><au>Kato Yushi</au><au>Iida Toshiyuki</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion sourcea</atitle><jtitle>Review of scientific instruments</jtitle><date>2014-02-01</date><risdate>2014</risdate><volume>85</volume><issue>2</issue><issn>0034-6748</issn><eissn>1089-7623</eissn><abstract>We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in ECRIS plasma at extremely low pressures (10−3–10−5 Pa) by using cylindrical Langmuir probe. From the result, it is found that the EEDF correlates with the electron density and the temperature from the conventional probe analysis. In addition, we confirm that the tail of EEDF spreads to high energy region as the pressure rises and that there are electrons with high energy in ECR multicharged ion source plasma. The effective temperature estimated from the experimentally obtained EEDF is larger than the electron temperature obtained from the conventional method.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.4829738</doi></addata></record> |
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| ispartof | Review of scientific instruments, 2014-02, Vol.85 (2) |
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| language | eng |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | Cyclotron resonance Distribution functions Electron cyclotron resonance Electron density Electron energy Electron energy distribution Electrons Energy Energy measurement Ion sources Ions Plasma Probe method (forecasting) Scientific apparatus & instruments |
| title | Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion sourcea |
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