Plasma characteristics of single- and dual-electrode ion source systems utilized in low-energy ion extractiona

Discharge characteristics in the upstream as well as in the downstream regions of a 50-eV positive ion beam were measured along the beam axis. Single- and dual-electrode configurations made of 0.1-mm diameter tungsten wires were tested. By varying the upstream discharge parameters, the shape of the sheath edge around the extractors, which can either be “planar” or “cylindrical,” can be controlled. The sheath eventually affected the simultaneous extraction of ions and neutralizing electrons. The dual-electrode configuration at the lower discharge current, revealed a homogeneous discharge downstream. At this condition, the edge of the sheath can be inferred to be “planar” which allowed the uniform extraction and propagation of low-energy ions at longer distances. The dual-electrode configuration was capable of transmitting low-energy ions up to 70 mm downstream.