Hybrid silicon-polymer platform for self-locking and self-deploying origami

This Letter reports the demonstration of self-locking and self-deploying functions of an origami platform based on silicon island arrays. The silicon islands serve as the rigid part of the origami and are able to integrate complementary metal–oxide–semiconductor circuits, microelectromechanical syst...

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Veröffentlicht in:	Applied physics letters 2013-12, Vol.103 (24)
Hauptverfasser:	Tu, Hongen, Jiang, Hanqing, Yu, Hongyu, Xu, Yong
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Balloons Connectors Liquid phases Locking Microelectromechanical systems Paraffin wax Silicon
Online-Zugang:	Volltext
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