A phononic bandgap shield for high- Q membrane microresonators

A phononic bandgap shield for high- Q membrane microresonators

A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed...

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Veröffentlicht in:Applied physics letters 2014-01, Vol.104 (2)
Hauptverfasser: Yu, P.-L., Cicak, K., Kampel, N. S., Tsaturyan, Y., Purdy, T. P., Simmonds, R. W., Regal, C. A.
Format: Artikel
Sprache:eng
Schlagworte:
Acoustic coupling
Applied physics
Energy gap
Membranes
Silicon nitride
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Zusammenfassung:A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4862031