A 2-in. mosaic wafer made of a single-crystal diamond

We synthesized a mosaic diamond wafer 2 in. in size (40 × 60 mm2), which consisted of 24 single-crystal diamond (SCD) plates 10 × 10 mm2 in area, by using microwave plasma chemical vapor deposition. Even by using a cloning technique, cracking frequently occurred and the non-uniformity was remarkable...

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Veröffentlicht in:Applied physics letters 2014-03, Vol.104 (10)
Hauptverfasser: Yamada, H., Chayahara, A., Mokuno, Y., Kato, Y., Shikata, S.
Format: Artikel
Sprache:eng
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Zusammenfassung:We synthesized a mosaic diamond wafer 2 in. in size (40 × 60 mm2), which consisted of 24 single-crystal diamond (SCD) plates 10 × 10 mm2 in area, by using microwave plasma chemical vapor deposition. Even by using a cloning technique, cracking frequently occurred and the non-uniformity was remarkable for wafers that were larger than 1 in. in size. This has not been observed in smaller samples before. Appropriate crystallographic directions could avoid the cracking and is one of the predominant factors in fabricating large area SCD wafers. Comparison with numerical simulations highlighted the importance of uniformity of the substrate temperature distribution on the uniformity of the growth.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4868720