Ultraviolet detection from energetically deposited titania films

Ultraviolet detection from energetically deposited titania films

Thin films of unintentionally doped n-type titania have been energetically deposited from a filtered cathodic vacuum arc. All films were dense, smooth, and transparent with crystallinity depending on the deposition/annealing temperature. At a growth temperature of 600 °C, the preferred phase could b...

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Veröffentlicht in:Applied physics letters 2014-03, Vol.104 (13)
Hauptverfasser: Field, M. R., Murdoch, B. J., McCulloch, D. G., Partridge, J. G.
Format: Artikel
Sprache:eng
Schlagworte:
Anatase
Applied physics
Arc deposition
Current voltage characteristics
Dynamic annealing
Phase transitions
Thin films
Titanium oxides
Ultraviolet detectors
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Zusammenfassung:Thin films of unintentionally doped n-type titania have been energetically deposited from a filtered cathodic vacuum arc. All films were dense, smooth, and transparent with crystallinity depending on the deposition/annealing temperature. At a growth temperature of 600 °C, the preferred phase could be changed from rutile to anatase by increasing the oxygen process pressure thereby reducing dynamic annealing. Pt/TiOx/Pt ultraviolet detectors exhibiting rectifying current-voltage characteristics and ultraviolet-visible rejection ratios exceeding 104:1 were formed on selected films.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4870069