Control of ions energy distribution in dual-frequency magnetron sputtering discharges

The ion energy distributions (IEDs) in the dual-frequency magnetron sputtering discharges were investigated by retarding field energy analyzer. Increasing power ratio of 2 MHz to 13.56 (27.12 or 60) MHz led to the evolution of IEDs from a uni-modal distribution towards a uni-modal distribution with...

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Veröffentlicht in:	Physics of plasmas 2014-04, Vol.21 (4)
Hauptverfasser:	Ye, Chao, He, Haijie, Huang, Fupei, Liu, Yi, Wang, Xiangying
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY Discharge DISTRIBUTION Electric power distribution Energy ENERGY SPECTRA Evolution INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY Ion energy distribution Magnetron sputtering MAGNETRONS MHZ RANGE 01-100 PEAKS Plasma physics Sheaths
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