Phase modulation in pulsed dual-frequency capacitively coupled plasmas

Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a g...

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Veröffentlicht in:Journal of applied physics 2014-06, Vol.115 (23)
Hauptverfasser: Wen, De-Qi, Zhang, Quan-Zhi, Jiang, Wei, Song, Yuan-Hong, Bogaerts, Annemie, Wang, You-Nian
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container_issue 23
container_start_page
container_title Journal of applied physics
container_volume 115
creator Wen, De-Qi
Zhang, Quan-Zhi
Jiang, Wei
Song, Yuan-Hong
Bogaerts, Annemie
Wang, You-Nian
description Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a great influence on the ion density and the ionization rate. By pulsing the high frequency source, the time-averaged ion density shows a maximum when θ = 90∘. The time-averaged ion energy distribution functions (IEDFs) at the driven electrode, however, keep almost unchanged, illustrating the potential of pulsed DF-CCP for independent control of ion density (and flux) and ion energy. A detailed investigation of the temporal evolution of the plasma characteristics indicates that several high frequency harmonics can be excited at the initial stage of a pulse period by tuning the phase shift θ, and this gives rise to strong sheath oscillations, and therefore high ionization rates. For comparison, the pulsing of the low frequency source is also studied. In this case, the ion density changes slightly as a function of time, and the time-averaged ion density shows the same trend as in the HF modulation for different phase shifts θ. Moreover, the time-averaged IEDFs at the driven electrode can be modulated, showing the potential to reduce the maximum ion bombardment energy.
doi_str_mv 10.1063/1.4884225
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source AIP Journals Complete; Alma/SFX Local Collection
subjects Applied physics
Computer simulation
Distribution functions
Electrodes
High frequencies
Ion bombardment
Ion density (concentration)
Ion energy distribution
Ionization
Particle in cell technique
Phase modulation
Phase shift
Plasma
Plasmas (physics)
Pulse modulation
Sheaths
title Phase modulation in pulsed dual-frequency capacitively coupled plasmas
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