Phase modulation in pulsed dual-frequency capacitively coupled plasmas
Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a g...
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creator | Wen, De-Qi Zhang, Quan-Zhi Jiang, Wei Song, Yuan-Hong Bogaerts, Annemie Wang, You-Nian |
description | Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a great influence on the ion density and the ionization rate. By pulsing the high frequency source, the time-averaged ion density shows a maximum when θ = 90∘. The time-averaged ion energy distribution functions (IEDFs) at the driven electrode, however, keep almost unchanged, illustrating the potential of pulsed DF-CCP for independent control of ion density (and flux) and ion energy. A detailed investigation of the temporal evolution of the plasma characteristics indicates that several high frequency harmonics can be excited at the initial stage of a pulse period by tuning the phase shift θ, and this gives rise to strong sheath oscillations, and therefore high ionization rates. For comparison, the pulsing of the low frequency source is also studied. In this case, the ion density changes slightly as a function of time, and the time-averaged ion density shows the same trend as in the HF modulation for different phase shifts θ. Moreover, the time-averaged IEDFs at the driven electrode can be modulated, showing the potential to reduce the maximum ion bombardment energy. |
doi_str_mv | 10.1063/1.4884225 |
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fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2126585484</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2126585484</sourcerecordid><originalsourceid>FETCH-LOGICAL-c257t-a8352a6ad27058a78732bab8bc497ba5c32bf5e67f41ebb4b17fe19cf07df9ae3</originalsourceid><addsrcrecordid>eNotkEFLxDAUhIMouK4e_AcFTx665qVJkxxlcVdhQQ96Di9pgl26bU1aYf-9kd3TY-CbmccQcg90BbSunmDFleKMiQuyAKp0KYWgl2RBKYNSaamvyU1Ke0oBVKUXZPPxjckXh6GZO5zaoS_avhjnLvmmaGbsyhD9z-x7dywcjujaqf31XRbDPHaZGTtMB0y35CpgNt2d75J8bV4-16_l7n37tn7elY4JOZWoKsGwxoZJKhRKJStm0SrruJYWhcsyCF_LwMFbyy3I4EG7QGUTNPpqSR5OuWMc8ltpMvthjn2uNAxYLZTgimfq8US5OKQUfTBjbA8Yjwao-Z_JgDnPVP0BivZakw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2126585484</pqid></control><display><type>article</type><title>Phase modulation in pulsed dual-frequency capacitively coupled plasmas</title><source>AIP Journals Complete</source><source>Alma/SFX Local Collection</source><creator>Wen, De-Qi ; Zhang, Quan-Zhi ; Jiang, Wei ; Song, Yuan-Hong ; Bogaerts, Annemie ; Wang, You-Nian</creator><creatorcontrib>Wen, De-Qi ; Zhang, Quan-Zhi ; Jiang, Wei ; Song, Yuan-Hong ; Bogaerts, Annemie ; Wang, You-Nian</creatorcontrib><description>Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a great influence on the ion density and the ionization rate. By pulsing the high frequency source, the time-averaged ion density shows a maximum when θ = 90∘. The time-averaged ion energy distribution functions (IEDFs) at the driven electrode, however, keep almost unchanged, illustrating the potential of pulsed DF-CCP for independent control of ion density (and flux) and ion energy. A detailed investigation of the temporal evolution of the plasma characteristics indicates that several high frequency harmonics can be excited at the initial stage of a pulse period by tuning the phase shift θ, and this gives rise to strong sheath oscillations, and therefore high ionization rates. For comparison, the pulsing of the low frequency source is also studied. In this case, the ion density changes slightly as a function of time, and the time-averaged ion density shows the same trend as in the HF modulation for different phase shifts θ. Moreover, the time-averaged IEDFs at the driven electrode can be modulated, showing the potential to reduce the maximum ion bombardment energy.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.4884225</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Applied physics ; Computer simulation ; Distribution functions ; Electrodes ; High frequencies ; Ion bombardment ; Ion density (concentration) ; Ion energy distribution ; Ionization ; Particle in cell technique ; Phase modulation ; Phase shift ; Plasma ; Plasmas (physics) ; Pulse modulation ; Sheaths</subject><ispartof>Journal of applied physics, 2014-06, Vol.115 (23)</ispartof><rights>2014 AIP Publishing LLC.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c257t-a8352a6ad27058a78732bab8bc497ba5c32bf5e67f41ebb4b17fe19cf07df9ae3</citedby><cites>FETCH-LOGICAL-c257t-a8352a6ad27058a78732bab8bc497ba5c32bf5e67f41ebb4b17fe19cf07df9ae3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Wen, De-Qi</creatorcontrib><creatorcontrib>Zhang, Quan-Zhi</creatorcontrib><creatorcontrib>Jiang, Wei</creatorcontrib><creatorcontrib>Song, Yuan-Hong</creatorcontrib><creatorcontrib>Bogaerts, Annemie</creatorcontrib><creatorcontrib>Wang, You-Nian</creatorcontrib><title>Phase modulation in pulsed dual-frequency capacitively coupled plasmas</title><title>Journal of applied physics</title><description>Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a great influence on the ion density and the ionization rate. By pulsing the high frequency source, the time-averaged ion density shows a maximum when θ = 90∘. The time-averaged ion energy distribution functions (IEDFs) at the driven electrode, however, keep almost unchanged, illustrating the potential of pulsed DF-CCP for independent control of ion density (and flux) and ion energy. A detailed investigation of the temporal evolution of the plasma characteristics indicates that several high frequency harmonics can be excited at the initial stage of a pulse period by tuning the phase shift θ, and this gives rise to strong sheath oscillations, and therefore high ionization rates. For comparison, the pulsing of the low frequency source is also studied. In this case, the ion density changes slightly as a function of time, and the time-averaged ion density shows the same trend as in the HF modulation for different phase shifts θ. Moreover, the time-averaged IEDFs at the driven electrode can be modulated, showing the potential to reduce the maximum ion bombardment energy.</description><subject>Applied physics</subject><subject>Computer simulation</subject><subject>Distribution functions</subject><subject>Electrodes</subject><subject>High frequencies</subject><subject>Ion bombardment</subject><subject>Ion density (concentration)</subject><subject>Ion energy distribution</subject><subject>Ionization</subject><subject>Particle in cell technique</subject><subject>Phase modulation</subject><subject>Phase shift</subject><subject>Plasma</subject><subject>Plasmas (physics)</subject><subject>Pulse modulation</subject><subject>Sheaths</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNotkEFLxDAUhIMouK4e_AcFTx665qVJkxxlcVdhQQ96Di9pgl26bU1aYf-9kd3TY-CbmccQcg90BbSunmDFleKMiQuyAKp0KYWgl2RBKYNSaamvyU1Ke0oBVKUXZPPxjckXh6GZO5zaoS_avhjnLvmmaGbsyhD9z-x7dywcjujaqf31XRbDPHaZGTtMB0y35CpgNt2d75J8bV4-16_l7n37tn7elY4JOZWoKsGwxoZJKhRKJStm0SrruJYWhcsyCF_LwMFbyy3I4EG7QGUTNPpqSR5OuWMc8ltpMvthjn2uNAxYLZTgimfq8US5OKQUfTBjbA8Yjwao-Z_JgDnPVP0BivZakw</recordid><startdate>20140621</startdate><enddate>20140621</enddate><creator>Wen, De-Qi</creator><creator>Zhang, Quan-Zhi</creator><creator>Jiang, Wei</creator><creator>Song, Yuan-Hong</creator><creator>Bogaerts, Annemie</creator><creator>Wang, You-Nian</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20140621</creationdate><title>Phase modulation in pulsed dual-frequency capacitively coupled plasmas</title><author>Wen, De-Qi ; Zhang, Quan-Zhi ; Jiang, Wei ; Song, Yuan-Hong ; Bogaerts, Annemie ; Wang, You-Nian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c257t-a8352a6ad27058a78732bab8bc497ba5c32bf5e67f41ebb4b17fe19cf07df9ae3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Applied physics</topic><topic>Computer simulation</topic><topic>Distribution functions</topic><topic>Electrodes</topic><topic>High frequencies</topic><topic>Ion bombardment</topic><topic>Ion density (concentration)</topic><topic>Ion energy distribution</topic><topic>Ionization</topic><topic>Particle in cell technique</topic><topic>Phase modulation</topic><topic>Phase shift</topic><topic>Plasma</topic><topic>Plasmas (physics)</topic><topic>Pulse modulation</topic><topic>Sheaths</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wen, De-Qi</creatorcontrib><creatorcontrib>Zhang, Quan-Zhi</creatorcontrib><creatorcontrib>Jiang, Wei</creatorcontrib><creatorcontrib>Song, Yuan-Hong</creatorcontrib><creatorcontrib>Bogaerts, Annemie</creatorcontrib><creatorcontrib>Wang, You-Nian</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wen, De-Qi</au><au>Zhang, Quan-Zhi</au><au>Jiang, Wei</au><au>Song, Yuan-Hong</au><au>Bogaerts, Annemie</au><au>Wang, You-Nian</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Phase modulation in pulsed dual-frequency capacitively coupled plasmas</atitle><jtitle>Journal of applied physics</jtitle><date>2014-06-21</date><risdate>2014</risdate><volume>115</volume><issue>23</issue><issn>0021-8979</issn><eissn>1089-7550</eissn><abstract>Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a great influence on the ion density and the ionization rate. By pulsing the high frequency source, the time-averaged ion density shows a maximum when θ = 90∘. The time-averaged ion energy distribution functions (IEDFs) at the driven electrode, however, keep almost unchanged, illustrating the potential of pulsed DF-CCP for independent control of ion density (and flux) and ion energy. A detailed investigation of the temporal evolution of the plasma characteristics indicates that several high frequency harmonics can be excited at the initial stage of a pulse period by tuning the phase shift θ, and this gives rise to strong sheath oscillations, and therefore high ionization rates. For comparison, the pulsing of the low frequency source is also studied. In this case, the ion density changes slightly as a function of time, and the time-averaged ion density shows the same trend as in the HF modulation for different phase shifts θ. Moreover, the time-averaged IEDFs at the driven electrode can be modulated, showing the potential to reduce the maximum ion bombardment energy.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.4884225</doi></addata></record> |
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subjects | Applied physics Computer simulation Distribution functions Electrodes High frequencies Ion bombardment Ion density (concentration) Ion energy distribution Ionization Particle in cell technique Phase modulation Phase shift Plasma Plasmas (physics) Pulse modulation Sheaths |
title | Phase modulation in pulsed dual-frequency capacitively coupled plasmas |
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