Submicron organic thin-film transistors fabricated by film profile engineering method

In this work, we explore and demonstrate the feasibility of a film profile engineering (FPE) concept in fabricating pentacene-based organic thin-film transistors (OTFTs) with submicron channel length. The FPE scheme utilizes a suspended bridge built on the wafer and the specific deposition condition...

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Veröffentlicht in:	Applied physics letters 2014-07, Vol.105 (4)
Hauptverfasser:	Wu, Ming-Hung, Lin, Horng-Chih, Lin, Hung-Cheng, Zan, Hsiao-Wen, Meng, Hsin-Fei, Huang, Tiao-Yuan
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Deposition Evaporators Semiconductor devices Thin film transistors Transistors
Online-Zugang:	Volltext
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