Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion
We report that a TaOx underlayer enhances the stability of perpendicular magnetic anisotropy (PMA) in TaOx/Ta/CoFeB/MgO stacks during annealing; control of oxygen content in the TaOx layer is critical. X-ray photoelectron spectroscopy observations revealed clear suppression of Ta atom diffusion towa...
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| Veröffentlicht in: | Journal of applied physics 2014-09, Vol.116 (11) |
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| container_issue | 11 |
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| container_title | Journal of applied physics |
| container_volume | 116 |
| creator | Yang, SeungMo Lee, JaBin An, GwangGuk Kim, JaeHong Chung, WooSeong Hong, JinPyo |
| description | We report that a TaOx underlayer enhances the stability of perpendicular magnetic anisotropy (PMA) in TaOx/Ta/CoFeB/MgO stacks during annealing; control of oxygen content in the TaOx layer is critical. X-ray photoelectron spectroscopy observations revealed clear suppression of Ta atom diffusion towards the CoFeB/MgO interface or MgO regions. The TaOx underlayer possibly served as a diffusion sponge, permitting some thermally activated Ta atoms to impregnate the TaOx underlayer via a diffusion path, such as grain boundaries. We propose a possible mechanism for enhanced PMA stability based on diffusion of thermally activated Ta atoms. |
| doi_str_mv | 10.1063/1.4895709 |
| format | Article |
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X-ray photoelectron spectroscopy observations revealed clear suppression of Ta atom diffusion towards the CoFeB/MgO interface or MgO regions. The TaOx underlayer possibly served as a diffusion sponge, permitting some thermally activated Ta atoms to impregnate the TaOx underlayer via a diffusion path, such as grain boundaries. We propose a possible mechanism for enhanced PMA stability based on diffusion of thermally activated Ta atoms.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.4895709</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Applied physics ; Diffusion ; Grain boundaries ; Magnesium oxide ; Magnetic anisotropy ; Oxygen content ; Stacks ; Thermal stability ; X ray spectra</subject><ispartof>Journal of applied physics, 2014-09, Vol.116 (11)</ispartof><rights>2014 AIP Publishing LLC.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c187t-4c6d7c721fa44f38a348536f493856731e51d4035616588063ca2d5047bd88d3</citedby><cites>FETCH-LOGICAL-c187t-4c6d7c721fa44f38a348536f493856731e51d4035616588063ca2d5047bd88d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Yang, SeungMo</creatorcontrib><creatorcontrib>Lee, JaBin</creatorcontrib><creatorcontrib>An, GwangGuk</creatorcontrib><creatorcontrib>Kim, JaeHong</creatorcontrib><creatorcontrib>Chung, WooSeong</creatorcontrib><creatorcontrib>Hong, JinPyo</creatorcontrib><title>Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion</title><title>Journal of applied physics</title><description>We report that a TaOx underlayer enhances the stability of perpendicular magnetic anisotropy (PMA) in TaOx/Ta/CoFeB/MgO stacks during annealing; control of oxygen content in the TaOx layer is critical. X-ray photoelectron spectroscopy observations revealed clear suppression of Ta atom diffusion towards the CoFeB/MgO interface or MgO regions. The TaOx underlayer possibly served as a diffusion sponge, permitting some thermally activated Ta atoms to impregnate the TaOx underlayer via a diffusion path, such as grain boundaries. We propose a possible mechanism for enhanced PMA stability based on diffusion of thermally activated Ta atoms.</description><subject>Applied physics</subject><subject>Diffusion</subject><subject>Grain boundaries</subject><subject>Magnesium oxide</subject><subject>Magnetic anisotropy</subject><subject>Oxygen content</subject><subject>Stacks</subject><subject>Thermal stability</subject><subject>X ray spectra</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNotkD1PwzAYhC0EEqUw8A8sMTGksePPjFBRQCrqEokxeus4JSWNg-0gwq8nFV3uhjvdSQ9Ct5QsKJEspQuuc6FIfoZmlOg8UUKQczQjJKOJzlV-ia5C2BNCqWb5DP0WH9YfoG1HHCJsW4t763vbVY0ZWvD4ALvOxsZg6Jrgonf9iGsLcfA2YFfjAtICNj-TpEu3so_p226Tvh-3zGfA3w3gY4yHrrK-hdF63HTB-ti47hpd1NAGe3PyOSpWT8XyJVlvnl-XD-vEUK1iwo2slFEZrYHzmmlgXAsma54zLaRi1ApaccKEpFJoPUEwkFWCcLWttK7YHN39z_befQ02xHLvBt9Nj2VGMykkl1xMrfv_lvEuBG_rsvfNAfxYUlIeyZa0PJFlfwI5amQ</recordid><startdate>20140921</startdate><enddate>20140921</enddate><creator>Yang, SeungMo</creator><creator>Lee, JaBin</creator><creator>An, GwangGuk</creator><creator>Kim, JaeHong</creator><creator>Chung, WooSeong</creator><creator>Hong, JinPyo</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20140921</creationdate><title>Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion</title><author>Yang, SeungMo ; Lee, JaBin ; An, GwangGuk ; Kim, JaeHong ; Chung, WooSeong ; Hong, JinPyo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c187t-4c6d7c721fa44f38a348536f493856731e51d4035616588063ca2d5047bd88d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Applied physics</topic><topic>Diffusion</topic><topic>Grain boundaries</topic><topic>Magnesium oxide</topic><topic>Magnetic anisotropy</topic><topic>Oxygen content</topic><topic>Stacks</topic><topic>Thermal stability</topic><topic>X ray spectra</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yang, SeungMo</creatorcontrib><creatorcontrib>Lee, JaBin</creatorcontrib><creatorcontrib>An, GwangGuk</creatorcontrib><creatorcontrib>Kim, JaeHong</creatorcontrib><creatorcontrib>Chung, WooSeong</creatorcontrib><creatorcontrib>Hong, JinPyo</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yang, SeungMo</au><au>Lee, JaBin</au><au>An, GwangGuk</au><au>Kim, JaeHong</au><au>Chung, WooSeong</au><au>Hong, JinPyo</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion</atitle><jtitle>Journal of applied physics</jtitle><date>2014-09-21</date><risdate>2014</risdate><volume>116</volume><issue>11</issue><issn>0021-8979</issn><eissn>1089-7550</eissn><abstract>We report that a TaOx underlayer enhances the stability of perpendicular magnetic anisotropy (PMA) in TaOx/Ta/CoFeB/MgO stacks during annealing; control of oxygen content in the TaOx layer is critical. X-ray photoelectron spectroscopy observations revealed clear suppression of Ta atom diffusion towards the CoFeB/MgO interface or MgO regions. The TaOx underlayer possibly served as a diffusion sponge, permitting some thermally activated Ta atoms to impregnate the TaOx underlayer via a diffusion path, such as grain boundaries. We propose a possible mechanism for enhanced PMA stability based on diffusion of thermally activated Ta atoms.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/1.4895709</doi></addata></record> |
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| ispartof | Journal of applied physics, 2014-09, Vol.116 (11) |
| issn | 0021-8979 1089-7550 |
| language | eng |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | Applied physics Diffusion Grain boundaries Magnesium oxide Magnetic anisotropy Oxygen content Stacks Thermal stability X ray spectra |
| title | Thermally stable perpendicular magnetic anisotropy features of Ta/TaOx/Ta/CoFeB/MgO/W stacks via TaOx underlayer insertion |
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