The control of oscillation mode in silicon microbeams using silicon nitride anchor

We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating...

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Veröffentlicht in:	Applied physics letters 2014-09, Vol.105 (10)
Hauptverfasser:	Baek, In-Bok, Lee, Bong Kuk, Kim, Yarkyeon, Ahn, Chang-Geun, Kim, Young Jun, Yoon, Yong Sun, Jang, Won Ik, Kim, Hakseong, Lee, Sang Wook, Lee, Seongjae, Yu, Han Young
Format:	Artikel
Sprache:	eng
Schlagworte:	Anchors Applied physics Extreme values Frequency shift Gold Gravimetry Microbeams Microelectromechanical systems Nanoparticles Oscillation modes Self-assembled monolayers Self-assembly Sensors Silicon nitride
Online-Zugang:	Volltext
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