Scavenging of oxygen from SrTiO3 during oxide thin film deposition and the formation of interfacial 2DEGs

SrTiO3 is a widely used substrate for the growth of other functional oxide thin films. The reactivity of the substrate with respect to the film during deposition, particularly with regard to redox reactions, has typically been glossed over. We demonstrate by depositing a variety of metals (Ti, Al, N...

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Veröffentlicht in:	Journal of applied physics 2017-03, Vol.121 (10)
Hauptverfasser:	Posadas, Agham B., Kormondy, Kristy J., Guo, Wei, Ponath, Patrick, Geler-Kremer, Jacqueline, Hadamek, Tobias, Demkov, Alexander A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Applied physics Deposition Electron gas Free energy Heat of formation Metal films Niobium Redox reactions Scavenging Strontium titanates Substrates Thin films Titanium
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