Ultra-sensitive NEMS magnetoelectric sensor for picotesla DC magnetic field detection

We report a highly sensitive NEMS DC/low frequency magnetic field sensor consisting of an AlN/FeGaB resonator, with a ΔE effect-based sensing principle. Unlike previously reported magnetic field detection schemes, such as observing induced magnetoelectric voltage, or monitoring impedance, we designe...

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Veröffentlicht in:	Applied physics letters 2017-04, Vol.110 (14)
Hauptverfasser:	Li, Menghui, Matyushov, Alexei, Dong, Cunzheng, Chen, Huaihao, Lin, Hwaider, Nan, Tianxiang, Qian, Zhenyun, Rinaldi, Matteo, Lin, Yuanhua, Sun, Nian X.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum nitride Applied physics Electric potential Frequency shift Magnetic fields Magnetic resonance Nanoelectromechanical systems Resonators Sensors
Online-Zugang:	Volltext
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