Properties of the extreme ultraviolet emission from germanium and gallium plasmas

We report on the usefulness of germanium (Ge) and gallium (Ga) plasmas as potential extreme ultraviolet (EUV) sources at both 6.x and 13.5 nm, wavelengths of interest for lithography and metrology applications. Spectra from plasmas produced using neodymium-doped yttrium-aluminum-garnet (Nd:YAG) lase...

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Veröffentlicht in:Journal of applied physics 2015-08, Vol.118 (7)
Hauptverfasser: Li, Bowen, Hara, Hiroyuki, Suzuki, Yuhei, Arai, Goki, Higashiguchi, Takeshi, Ohashi, Hayato, Jiang, Weihua, Makimura, Tetsuya, Sakaue, Hiroyuki A., Suzuki, Chihiro, Kato, Daiji, Murakami, Izumi, Dunne, Padraig, Long, Elaine, Sheridan, Paul, Chen, Ximeng, O'Sullivan, Gerry
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container_end_page
container_issue 7
container_start_page
container_title Journal of applied physics
container_volume 118
creator Li, Bowen
Hara, Hiroyuki
Suzuki, Yuhei
Arai, Goki
Higashiguchi, Takeshi
Ohashi, Hayato
Jiang, Weihua
Makimura, Tetsuya
Sakaue, Hiroyuki A.
Suzuki, Chihiro
Kato, Daiji
Murakami, Izumi
Dunne, Padraig
Long, Elaine
Sheridan, Paul
Chen, Ximeng
O'Sullivan, Gerry
description We report on the usefulness of germanium (Ge) and gallium (Ga) plasmas as potential extreme ultraviolet (EUV) sources at both 6.x and 13.5 nm, wavelengths of interest for lithography and metrology applications. Spectra from plasmas produced using neodymium-doped yttrium-aluminum-garnet (Nd:YAG) lasers with pulse durations of 170 ps and 7 ns [full width at half-maximum] and a compact electron beam ion trap have been used to determine the charge states responsible while theoretical calculations using atomic structure Cowan and HULLAC codes enabled the identification of structure in the Ge spectrum arising from strong transitions of the type 3d – 4p and 3d – 4f. Transitions of the type 3d – 4f in Ge10+ and Ga11+ were found to lie in the 6.x nm region, while 3p−3d transitions from a range of stages in both elements contribute in the 13.5 nm region. We also studied the emission spectra of galinstan plasmas, and the results imply that galinstan might provide a promising candidate for EUV applications that exploit the progress in the development of multilayer mirrors for operation at 6.x nm.
doi_str_mv 10.1063/1.4928673
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Spectra from plasmas produced using neodymium-doped yttrium-aluminum-garnet (Nd:YAG) lasers with pulse durations of 170 ps and 7 ns [full width at half-maximum] and a compact electron beam ion trap have been used to determine the charge states responsible while theoretical calculations using atomic structure Cowan and HULLAC codes enabled the identification of structure in the Ge spectrum arising from strong transitions of the type 3d – 4p and 3d – 4f. Transitions of the type 3d – 4f in Ge10+ and Ga11+ were found to lie in the 6.x nm region, while 3p−3d transitions from a range of stages in both elements contribute in the 13.5 nm region. 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source American Institute of Physics (AIP) Journals; Alma/SFX Local Collection
subjects Aluminum
Applied physics
Atomic structure
Electron beam lithography
Emission analysis
Emission spectra
Gallium
Germanium
Ions
Multilayers
Neodymium
Plasma
Plasmas (physics)
Ultraviolet emission
YAG lasers
Yttrium
title Properties of the extreme ultraviolet emission from germanium and gallium plasmas
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