Mode transition and hysteresis in inductively coupled radio frequency argon discharge

This contribution presents experimental results about the mode transition of an inductively coupled radio frequency (RF) (13.56 MHz) argon discharge at different total gas pressures. In particular, the positive ion saturation current and the line integrated electron density are measured by Langmuir...

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Veröffentlicht in:	Physics of plasmas 2016-02, Vol.23 (2)
Hauptverfasser:	Wegner, Th, Küllig, C., Meichsner, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon Coils Discharge Electric potential Electron density Gas pressure Hysteresis Plasma Plasma physics Positive ions Pressure dependence Radio frequency Saturation Sheaths
Online-Zugang:	Volltext
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