Control of mechanical response of freestanding PbZr0.52Ti0.48O3 films through texture

The texture of piezoelectric lead zirconate titanate (PZT) thin films plays a key role in their mechanical response and linearity in the stress vs. strain behavior. The open circuit mechanical properties of PZT films with controlled texture varying from 100% (001) to 100% (111) were quantified with...

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Veröffentlicht in:	Applied physics letters 2016-09, Vol.109 (13)
Hauptverfasser:	Das, Debashish, Sanchez, Luz, Martin, Joel, Power, Brian, Isaacson, Steven, Polcawich, Ronald G., Chasiotis, Ioannis
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Domains Grain orientation Lead titanates Lead zirconate titanates Linearity Mechanical analysis Mechanical properties Micromechanics Modulus of elasticity Piezoelectricity Strain Stresses Substrates Switching Texture Thick films Thin films
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