Quasi-ballistic thermal transport in Al0.1Ga0.9N thin film semiconductors

We investigate thermal transport in high-quality Al0.1Ga0.9N thin films grown using plasma-assisted molecular beam epitaxy by time-domain thermoreflectance (TDTR) in the 100 K–500 K temperature range. The apparent thermal conductivity at 300 K and 500 K drops by 30% when the laser modulation frequen...

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Veröffentlicht in:Applied physics letters 2016-12, Vol.109 (24)
Hauptverfasser: Koh, Yee Rui, Shirazi-HD, MohammadAli, Vermeersch, Bjorn, Mohammed, Amr M. S., Shao, Jiayi, Pernot, Gilles, Bahk, Je-Hyeong, Manfra, Michael J., Shakouri, Ali
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container_issue 24
container_start_page
container_title Applied physics letters
container_volume 109
creator Koh, Yee Rui
Shirazi-HD, MohammadAli
Vermeersch, Bjorn
Mohammed, Amr M. S.
Shao, Jiayi
Pernot, Gilles
Bahk, Je-Hyeong
Manfra, Michael J.
Shakouri, Ali
description We investigate thermal transport in high-quality Al0.1Ga0.9N thin films grown using plasma-assisted molecular beam epitaxy by time-domain thermoreflectance (TDTR) in the 100 K–500 K temperature range. The apparent thermal conductivity at 300 K and 500 K drops by 30% when the laser modulation frequency is increased from 0.8 MHz to 10 MHz. Tempered Lévy analysis of the quasi-ballistic heat conduction reveals superdiffusion exponents α ≈ 1.70 ± 0.06 at room temperature and α ≈ 1.83 ± 0.16 at 500 K. We describe limitations in concurrent extraction of other model parameters and also discuss the impact of boundary scattering in the 100 K–200 K temperature range.
doi_str_mv 10.1063/1.4972186
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subjects Applied physics
Condensed Matter
Conduction heating
Conductive heat transfer
Epitaxial growth
Materials Science
Molecular beam epitaxy
Physics
Thermal conductivity
Thin films
Transport
title Quasi-ballistic thermal transport in Al0.1Ga0.9N thin film semiconductors
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