Automated TEM Sample Preparation from Smaller Device Structure Regions of Semiconductor ICs using Inline Dual-Beam CLM+ and TEMLink 150

Automated TEM Sample Preparation from Smaller Device Structure Regions of Semiconductor ICs using Inline Dual-Beam CLM+ and TEMLink 150

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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Bibliographische Detailangaben
Veröffentlicht in:Microscopy and microanalysis 2013-08, Vol.19 (S2), p.900-901
Hauptverfasser: Rai, R.S., Chen, E., Zhang, Y., Nedeau, D., Chen, Y., Zhao, W., Lim, S.K., Mai, Z.-H., Lam, J.
Format: Artikel
Sprache:eng
Schlagworte:
A11.P1 Ion Beam Instrumentation and Applications for Physical and Biological Sciences
Instrumentation Sciences
Integrated circuits
Sample preparation
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Beschreibung
Zusammenfassung:Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.
ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927613006491