Influence of pulse energy on machining characteristics in laser induced plasma micro-machining

This work investigates the influence of pulse energy on machining characteristics using a 10 ps laser during Laser induced plasma micromachining (LIPMM) process. An axisymmetric model combining the effects of cascade, multiphoton ionization, and recombination and diffusion losses was developed to si...

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Veröffentlicht in:	Journal of materials processing technology 2018-12, Vol.262, p.85-94
Hauptverfasser:	Wang, Xingsheng, Ma, Chenbin, Li, Chengyu, Kang, Min, Ehmann, Kornel
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Distilled water Focal plane Geometry Ionization Laser induced breakdown Laser induced plasma micromachining Laser plasmas Lasers Machining Micro-channel geometry Microchannels Micromachining Plasma focusing process Plasma physics Plasma simulation Simulation
Online-Zugang:	Volltext
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