Utilizing Low-Dose Transmission Electron Microscopy for Structure and Defect Identification in Group III - Nitride Electronic Devices
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| Veröffentlicht in: | Microscopy and microanalysis 2018-08, Vol.24 (S1), p.1972-1973 |
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| container_end_page | 1973 |
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| container_issue | S1 |
| container_start_page | 1972 |
| container_title | Microscopy and microanalysis |
| container_volume | 24 |
| creator | Specht, Petra Luysberg, Martina Chavez, J. Weatherford, T.R. Anderson, T.J. Koehler, A.D. Kisielowski, C. |
| description | |
| doi_str_mv | 10.1017/S1431927618010346 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 1431-9276 |
| ispartof | Microscopy and microanalysis, 2018-08, Vol.24 (S1), p.1972-1973 |
| issn | 1431-9276 1435-8115 |
| language | eng |
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| source | Cambridge University Press Journals Complete |
| subjects | Electronic devices Electronic equipment Modulating Electron Beams in Space and Time to Probe for Structure and Function of Soft and Hard Matter Physical Science Symposia Transmission electron microscopy |
| title | Utilizing Low-Dose Transmission Electron Microscopy for Structure and Defect Identification in Group III - Nitride Electronic Devices |
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