Broadband millimeter-wave anti-reflection coatings on silicon using pyramidal sub-wavelength structures

We used two novel approaches to produce sub-wavelength structure anti-reflection coatings on silicon for millimeter and sub-millimeter wave bands: picosecond laser ablation and dicing with beveled saws. We produced pyramidal structures with both techniques. The diced sample, machined on only one sid...

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Veröffentlicht in:	Journal of applied physics 2017-06, Vol.121 (21)
Hauptverfasser:	Young, Karl, Wen, Qi, Hanany, Shaul, Imada, Hiroaki, Koch, Jürgen, Matsumura, Tomotake, Suttmann, Oliver, Schütz, Viktor
Format:	Artikel
Sprache:	eng
Schlagworte:	Antireflection coatings Applied physics Banded structure Bandwidths Broadband Finite element method Laser ablation Lasers Millimeter waves Reflectance Saws Silicon Wave reflection
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