Interaction of accelerated argon cluster ions with a silicon dioxide surface

Gas cluster ion beams bring new opportunities for diagnostics and modification of materials surfaces. In this work impact of argon clusters on silicon dioxide has been studied by molecular dynamics simulations and experimentally. We have obtained dependencies of crater size and the SiO2 sputtering y...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Korobeishchikov, N. G., Stishenko, P. V., Popenko, Y. A., Roenko, M. A., Nikolaev, I. V.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Argon Clusters Computer simulation Ion beams Molecular dynamics Silicon dioxide Surface layers
Online-Zugang:	Volltext
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