The formation of diamond like carbon on carbon steel using plasma of argon-liquified petrolium gas mixing

Diamond like carbon (DLC) is very important materials for mechanical industryespeciallycutting tools, automotive and production machines components. Formation of DLC on metal surface usually use a mixture of hydrocarbon/Ar plasma, such as CH4/Ar, C2H6/Ar, and C2H4/Arplasma. These materials are expen...

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Hauptverfasser: Suprapto, Sujitno, Tjipto, Andriyanti, Wiwien, Pribadi, Bangun
Format: Tagungsbericht
Sprache:eng
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