LOCALIZED LASER VAPORIZATION OF FILMS WITH COMPLEX TOPOLOGIES FOR SURFACE ACOUSTIC WAVE MICROGYROSCOPE SENSOR

We have developed a method for localized laser vaporization of a sensitive element film for a solid microgyroscope based on surface acoustic waves. A double-conversion scheme was chosen as a microgyroscope sensitive element configuration. It was shown that at least three technological operations are excluded at laser vaporization as compared with photolithography method. Research results on the formation of topologies with the usage of laser processing are presented. We have determined the parameters of laser processing for sensor topology configuring by means of thin-film coating evaporation with a thickness of 400 nm, which comprises 350 nm of aluminum and 50 nm of vanadium adhesive coating applied on a substrate made of quartz. The amplitude-frequency characteristic of the manufactured sample is obtained. It is revealed that the experimental sample has a high loss value caused by inaccuracies in its manufacturing technology. Recommendations were worked out for minimization of error sources in the manufacturing technology of microgyroscope sensitive element on surface acoustic waves with the use of the laser configuration method.