Optimization of an electron impact ion source on a MEMS time-of-flight mass spectrometer

[Display omitted] •We have microfabricated an electron impact ion source for integrated mass spectrometry.•Simulations were used to optimize the total ion current.•Ions are efficiently extracted and focused outside the ion source.•Hundreds of picoamperes of ion current is collected using this MEMS i...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2017-05, Vol.243, p.690-695
Hauptverfasser:	Vigne, Sébastien, Alava, Thomas, Tassetti, Charles-Marie, Duraffourg, Laurent, Progent, Frédéric
Format:	Artikel
Sprache:	eng
Schlagworte:	Efficiency Electron impact Electrons Gas analysis Ionization Ions Mass spectrometry MEMS Micro mass spectrometer Optimization Simion Simulation Time-of-flight
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