Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates

•Monocrystalline p-type Ge NWs have been locally grown on top of microhotplates.•Gas sensor based-on Ge NWs have been studied in a strict low temperature range.•Pre-adsorbed O2 is required for gas sensing towards reducing species.•The depicted sensing mechanism is comparable to the model for metal o...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2017-05, Vol.243, p.669-677
Hauptverfasser:	Samà, Jordi, Seifner, Michael S., Domènech-Gil, Guillem, Santander, Joaquín, Calaza, Carlos, Moreno, Mauricio, Gràcia, Isabel, Barth, Sven, Romano-Rodríguez, Albert
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon monoxide Device integration Gas sensors Germanium Germanium nanowires Germanium oxides Humidity Localized growth Low temperature Nanowires Nitrogen dioxide Oxygen Sensors Water vapor Water vapor gas sensor
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