Ion Implanted Photoresist Removal by Material Loss-Free Organic Solvent

Ion Implanted Photoresist Removal by Material Loss-Free Organic Solvent

Removal of highly ion-implanted photoresist on the trench-structured GaAs was conducted by mixtures of organic solvents with additives. The ion implanted KrF photoresist on trench-structured GaAs was completely removed at 30 °C when an additive was added to the DMSO+ acetonitrile (AcN) solution. In...

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Veröffentlicht in:Solid state phenomena 2018-08, Vol.282, p.52-56
Hauptverfasser: Lim, Sang Woo, Oh, Eunseok
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Photoresists
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description Removal of highly ion-implanted photoresist on the trench-structured GaAs was conducted by mixtures of organic solvents with additives. The ion implanted KrF photoresist on trench-structured GaAs was completely removed at 30 °C when an additive was added to the DMSO+ acetonitrile (AcN) solution. In addition, the removal rate of the implanted photoresist could be increased in DMSO+AcN+additive solution. It was also observed that the DMSO+AcN+additive solution did not cause significant material loss on the GaAs surface during the photoresist removal process.
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title Ion Implanted Photoresist Removal by Material Loss-Free Organic Solvent
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