Composition, Structure and Mechanical Properties of CrAlC Films Deposited by Arc Sputtering Technique

A focus point in this work was the research of the influence of deposition condition on properties of CrAlC films. CrAlC films were deposited by arc sputtering technique using arc sputtering of Cr-Al target and pulse arc sputtering of graphite target at different frequency. The multilayer [(CrAlC)+(...

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Veröffentlicht in:	Solid state phenomena 2018-08, Vol.279, p.160-166
Hauptverfasser:	Vladimirov, Alexander B., Rubshtein, Anna P., Plotnikov, Sergey A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Arc deposition Mechanical properties
Online-Zugang:	Volltext
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