Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator

We investigate the performance of solidly mounted resonators based on Ir/tilted-AlN/Ir piezoelectric stacks as biosensors. These films are deposited by varying the pressure, the cathode power and the temperature of a two-step process based on depositing (00·2)-tilted AlN active layers over an (10·3)...

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