A robust method to determine the contact resistance using the van der Pauw set up

The van der Pauw method to calculate the sheet resistance and the mobility of a semiconductor is a pervasive technique both in the microelectronics industry and in the condensed matter science field. There are hundreds of papers dealing with the influence of the contact size, non-uniformities and ot...

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Veröffentlicht in:	Measurement : journal of the International Measurement Confederation 2017-02, Vol.98, p.151-158
Hauptverfasser:	González-Díaz, G., Pastor, D., García-Hemme, E., Montero, D., García-Hernansanz, R., Olea, J., del Prado, A., San Andrés, E., Mártil, I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter physics Contact resistance Contacts Electric resistance Electrical resistivity Error detection Mathematical analysis Measurement Microelectronics PSPICE Resistivity Sheet resistance van der Pauw Voltmeters
Online-Zugang:	Volltext
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