A robust method to determine the contact resistance using the van der Pauw set up
The van der Pauw method to calculate the sheet resistance and the mobility of a semiconductor is a pervasive technique both in the microelectronics industry and in the condensed matter science field. There are hundreds of papers dealing with the influence of the contact size, non-uniformities and ot...
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| Veröffentlicht in: | Measurement : journal of the International Measurement Confederation 2017-02, Vol.98, p.151-158 |
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| container_title | Measurement : journal of the International Measurement Confederation |
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| creator | González-Díaz, G. Pastor, D. García-Hemme, E. Montero, D. García-Hernansanz, R. Olea, J. del Prado, A. San Andrés, E. Mártil, I. |
| description | The van der Pauw method to calculate the sheet resistance and the mobility of a semiconductor is a pervasive technique both in the microelectronics industry and in the condensed matter science field. There are hundreds of papers dealing with the influence of the contact size, non-uniformities and other second order effects. In this paper we will develop a simple methodology to evaluate the error produced by finite size contacts, detect the presence of contact resistance, calculate it for each contact, and determine the linear or rectifying behavior of the contact. We will also calculate the errors produced by the use of voltmeters with finite input resistance in relation with the sample sheet resistance. |
| doi_str_mv | 10.1016/j.measurement.2016.11.040 |
| format | Article |
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We will also calculate the errors produced by the use of voltmeters with finite input resistance in relation with the sample sheet resistance.</description><subject>Condensed matter physics</subject><subject>Contact resistance</subject><subject>Contacts</subject><subject>Electric resistance</subject><subject>Electrical resistivity</subject><subject>Error detection</subject><subject>Mathematical analysis</subject><subject>Measurement</subject><subject>Microelectronics</subject><subject>PSPICE</subject><subject>Resistivity</subject><subject>Sheet resistance</subject><subject>van der Pauw</subject><subject>Voltmeters</subject><issn>0263-2241</issn><issn>1873-412X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNqNkE1LxDAQhoMouK7-h4jn1iRN0_S4LH7BggoK3kKazLoptlmTVPHfm3U9ePQ0MPO8M8yD0DklJSVUXPblADpOAQYYU8lyq6S0JJwcoBmVTVVwyl4O0YwwURWMcXqMTmLsCSGiasUMPS5w8N0UEx4gbbzFyWMLCcLgRsBpA9j4MWmTcIDoYtKjATxFN77-DD_0mPGAH_T0iSMkPG1P0dFav0U4-61z9Hx99bS8LVb3N3fLxaownJBUaCks1bWRnWhr3fCaCdkQa7XlDayNrGkDnaV107aSGt1Z0AZ02zApRNVxWc3RxX7vNvj3CWJSvZ_CmE8qRuQOlLzKVLunTPAxBlirbXCDDl-KErUzqHr1x6DaGVSUqmwwZ5f7LOQ3PhwEFY2DLMC6ACYp690_tnwDMDuAjQ</recordid><startdate>201702</startdate><enddate>201702</enddate><creator>González-Díaz, G.</creator><creator>Pastor, D.</creator><creator>García-Hemme, E.</creator><creator>Montero, D.</creator><creator>García-Hernansanz, R.</creator><creator>Olea, J.</creator><creator>del Prado, A.</creator><creator>San Andrés, E.</creator><creator>Mártil, I.</creator><general>Elsevier Ltd</general><general>Elsevier Science Ltd</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>201702</creationdate><title>A robust method to determine the contact resistance using the van der Pauw set up</title><author>González-Díaz, G. ; Pastor, D. ; García-Hemme, E. ; Montero, D. ; García-Hernansanz, R. ; Olea, J. ; del Prado, A. ; San Andrés, E. ; Mártil, I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c400t-a86d1a5c8b695a74526870ddad47efc8517ebd1579981cabdeacea9728663b483</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Condensed matter physics</topic><topic>Contact resistance</topic><topic>Contacts</topic><topic>Electric resistance</topic><topic>Electrical resistivity</topic><topic>Error detection</topic><topic>Mathematical analysis</topic><topic>Measurement</topic><topic>Microelectronics</topic><topic>PSPICE</topic><topic>Resistivity</topic><topic>Sheet resistance</topic><topic>van der Pauw</topic><topic>Voltmeters</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>González-Díaz, G.</creatorcontrib><creatorcontrib>Pastor, D.</creatorcontrib><creatorcontrib>García-Hemme, E.</creatorcontrib><creatorcontrib>Montero, D.</creatorcontrib><creatorcontrib>García-Hernansanz, R.</creatorcontrib><creatorcontrib>Olea, J.</creatorcontrib><creatorcontrib>del Prado, A.</creatorcontrib><creatorcontrib>San Andrés, E.</creatorcontrib><creatorcontrib>Mártil, I.</creatorcontrib><collection>CrossRef</collection><jtitle>Measurement : journal of the International Measurement Confederation</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>González-Díaz, G.</au><au>Pastor, D.</au><au>García-Hemme, E.</au><au>Montero, D.</au><au>García-Hernansanz, R.</au><au>Olea, J.</au><au>del Prado, A.</au><au>San Andrés, E.</au><au>Mártil, I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A robust method to determine the contact resistance using the van der Pauw set up</atitle><jtitle>Measurement : journal of the International Measurement Confederation</jtitle><date>2017-02</date><risdate>2017</risdate><volume>98</volume><spage>151</spage><epage>158</epage><pages>151-158</pages><issn>0263-2241</issn><eissn>1873-412X</eissn><abstract>The van der Pauw method to calculate the sheet resistance and the mobility of a semiconductor is a pervasive technique both in the microelectronics industry and in the condensed matter science field. 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| ispartof | Measurement : journal of the International Measurement Confederation, 2017-02, Vol.98, p.151-158 |
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| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Condensed matter physics Contact resistance Contacts Electric resistance Electrical resistivity Error detection Mathematical analysis Measurement Microelectronics PSPICE Resistivity Sheet resistance van der Pauw Voltmeters |
| title | A robust method to determine the contact resistance using the van der Pauw set up |
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