A Partially Etched Structure of Light‐Addressable Potentiometric Sensor for High‐Spatial‐Resolution and High‐Speed Chemical Imaging

In this study, a partially etched structure of a light‐addressable potentiometric sensor (LAPS) is fabricated for high‐spatial‐resolution and high‐speed imaging of chemical species. An anisotropic etching process based on tetramethylammonium hydroxide (TMAH) is optimized to fabricate the structure,...

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Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2018-08, Vol.215 (15), p.n/a
Hauptverfasser:	Truong, Hoang Anh, Werner, Carl Frederik, Miyamoto, Ko‐ichiro, Yoshinobu, Tatsuo
Format:	Artikel
Sprache:	eng
Schlagworte:	Current carriers Imaging light‐addressable potentiometric sensors Organic chemistry partially etched structure Photoelectric effect Photoelectric emission Plates (structural members) Sensors spatial resolution
Online-Zugang:	Volltext
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