Development and characterization of sub-monolayer coatings as novel calibration samples for X-ray spectroscopy

With the advent of both modern X-ray fluorescence (XRF) methods and improved analytical reliability requirements the demand for suitable reference samples has increased. Especially in nanotechnology with the very low areal mass depositions, quantification becomes considerably more difficult. However...

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Veröffentlicht in:	Spectrochimica acta. Part B: Atomic spectroscopy 2018-07, Vol.145, p.36-42
Hauptverfasser:	Hönicke, Philipp, Krämer, Markus, Lühl, Lars, Andrianov, Konstantin, Beckhoff, Burkhard, Dietsch, Rainer, Holz, Thomas, Kanngießer, Birgit, Weißbach, Danny, Wilhein, Thomas
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical methods Calibration Coatings Copper Electrons Fluorescence Homogeneity Instrumentation Lead Molybdenum Monolayers Multilayers Nanotechnology Nickel Physical vapor deposition Quantification Radiation Reliability analysis Spectrum analysis Storage Synchrotron radiation TXRF calibration X-ray fluorescence X-ray spectroscopy XRF calibration
Online-Zugang:	Volltext
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