Synthesis of NF^sub 2^Cl and NFCl^sub 2^ using NH^sub 4^F/nHF and ClF^sub 3

Reactions between NH4F/nHF and gaseous ClF3 were examined at temperatures of 280–320 K under various n-values (n = 2.2, 2.3, 2.4, 2.7, 2.8, 3.0, 3.1, and 4.0) at which NH4F/nHF was a molten salt, with three ClF3 gas flow rates (20, 50 and 100 standard cc min−1). From a direct reaction, NF2Cl and NFC...

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Veröffentlicht in:	Journal of fluorine chemistry 2018-06, Vol.210, p.126
Hauptverfasser:	Miyazaki, Tatsuo, Mori, Isamu, Umezaki, Tomonori, Yonezawa, Susumu
Format:	Artikel
Sprache:	eng
Schlagworte:	Ammonia Chemical reactions Chemical vapor deposition Flow rates Fluorine Gas flow Gases Molecular chains Molten salts Reaction mechanisms Selectivity Semiconductors
Online-Zugang:	Volltext
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