Electrostatic compensation of structural imperfections in dynamically amplified dual-mass gyroscope

•MEMS gyroscope design utilizing coupled masses for dynamic amplification is shown.•Fabrication errors result in mode-splitting and reduction in amplificationfactor.•Precision electrostatic frequency tuning in a dual-massgyroscope is demonstrated.•Analytical model and experimental data are used toes...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2018-06, Vol.275, p.99-108
Hauptverfasser:	Efimovskaya, Alexandra, Wang, Danmeng, Lin, Yu-Wei, Shkel, Andrei M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Amplification Anisoelasticity Compensation Coupling Cross coupling Defects Degrees of freedom Dual-mass system Electrostatics Fabrication imperfections Frequency response Frequency split Gyroscopes Materials elasticity Mathematical analysis MEMS gyroscope Precision electrostatic tuning Stiffness matrix Tuning
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