Electrostatic compensation of structural imperfections in dynamically amplified dual-mass gyroscope

•MEMS gyroscope design utilizing coupled masses for dynamic amplification is shown.•Fabrication errors result in mode-splitting and reduction in amplificationfactor.•Precision electrostatic frequency tuning in a dual-massgyroscope is demonstrated.•Analytical model and experimental data are used toes...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2018-06, Vol.275, p.99-108
Hauptverfasser: Efimovskaya, Alexandra, Wang, Danmeng, Lin, Yu-Wei, Shkel, Andrei M.
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creator Efimovskaya, Alexandra
Wang, Danmeng
Lin, Yu-Wei
Shkel, Andrei M.
description •MEMS gyroscope design utilizing coupled masses for dynamic amplification is shown.•Fabrication errors result in mode-splitting and reduction in amplificationfactor.•Precision electrostatic frequency tuning in a dual-massgyroscope is demonstrated.•Analytical model and experimental data are used toestimate the system parameters.•Dynamically amplified gyroscope is used for verification ofthe tuning algorithm. This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in presence of fabrication imperfections and reports a method for precision electrostatic frequency tuning of the operational modes. A number of multi-mass MEMS gyroscopes have emerged in recent years pursuing different goals, such as dynamically balanced structure, increased bandwidth, and dynamic amplification. Along with many perceived advantages of multi-mass devices, several challenges associated with mode-matching in a system with increased number of degrees-of-freedom (DOF) have to be considered. This work shows that it is possible to apply the DC tuning techniques, similar to tuning a conventional single-mass gyroscope, to achieve the precision tuning in a dual-mass sensor, without losing advantages of increased DOF of the system. The presented frequency trimming technique is based on assessing the modes mismatch and cross-coupling between modes by means of fitting the experimental frequency response curves to the analytical solutions of the dual-mass system in presence of imperfections. The tuning algorithm involves two steps. First, the stiffness mismatch along the two axes and the anisoelasticity angles α and β are identified, then the tuning DC voltages for modification of diagonal, off-diagonal, and coupling terms in the stiffness matrix are chosen. The method of electrostatic tuning was validated through the experimental characterization of a dual-mass dynamically amplified gyroscope, where the coupling between the two operational modes was minimized and frequency split was reduced from 26 Hz down to 50 mHz, resulting in 17.5× increase in the gyroscope scale factor and significantly improved noise characteristics. The presented electrostatic compensation method is suitable for both off-line and on-line calibration.
doi_str_mv 10.1016/j.sna.2018.03.001
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This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in presence of fabrication imperfections and reports a method for precision electrostatic frequency tuning of the operational modes. A number of multi-mass MEMS gyroscopes have emerged in recent years pursuing different goals, such as dynamically balanced structure, increased bandwidth, and dynamic amplification. Along with many perceived advantages of multi-mass devices, several challenges associated with mode-matching in a system with increased number of degrees-of-freedom (DOF) have to be considered. This work shows that it is possible to apply the DC tuning techniques, similar to tuning a conventional single-mass gyroscope, to achieve the precision tuning in a dual-mass sensor, without losing advantages of increased DOF of the system. The presented frequency trimming technique is based on assessing the modes mismatch and cross-coupling between modes by means of fitting the experimental frequency response curves to the analytical solutions of the dual-mass system in presence of imperfections. The tuning algorithm involves two steps. First, the stiffness mismatch along the two axes and the anisoelasticity angles α and β are identified, then the tuning DC voltages for modification of diagonal, off-diagonal, and coupling terms in the stiffness matrix are chosen. The method of electrostatic tuning was validated through the experimental characterization of a dual-mass dynamically amplified gyroscope, where the coupling between the two operational modes was minimized and frequency split was reduced from 26 Hz down to 50 mHz, resulting in 17.5× increase in the gyroscope scale factor and significantly improved noise characteristics. 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A. Physical.</title><description>•MEMS gyroscope design utilizing coupled masses for dynamic amplification is shown.•Fabrication errors result in mode-splitting and reduction in amplificationfactor.•Precision electrostatic frequency tuning in a dual-massgyroscope is demonstrated.•Analytical model and experimental data are used toestimate the system parameters.•Dynamically amplified gyroscope is used for verification ofthe tuning algorithm. This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in presence of fabrication imperfections and reports a method for precision electrostatic frequency tuning of the operational modes. A number of multi-mass MEMS gyroscopes have emerged in recent years pursuing different goals, such as dynamically balanced structure, increased bandwidth, and dynamic amplification. Along with many perceived advantages of multi-mass devices, several challenges associated with mode-matching in a system with increased number of degrees-of-freedom (DOF) have to be considered. This work shows that it is possible to apply the DC tuning techniques, similar to tuning a conventional single-mass gyroscope, to achieve the precision tuning in a dual-mass sensor, without losing advantages of increased DOF of the system. The presented frequency trimming technique is based on assessing the modes mismatch and cross-coupling between modes by means of fitting the experimental frequency response curves to the analytical solutions of the dual-mass system in presence of imperfections. The tuning algorithm involves two steps. First, the stiffness mismatch along the two axes and the anisoelasticity angles α and β are identified, then the tuning DC voltages for modification of diagonal, off-diagonal, and coupling terms in the stiffness matrix are chosen. The method of electrostatic tuning was validated through the experimental characterization of a dual-mass dynamically amplified gyroscope, where the coupling between the two operational modes was minimized and frequency split was reduced from 26 Hz down to 50 mHz, resulting in 17.5× increase in the gyroscope scale factor and significantly improved noise characteristics. 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subjects Amplification
Anisoelasticity
Compensation
Coupling
Cross coupling
Defects
Degrees of freedom
Dual-mass system
Electrostatics
Fabrication imperfections
Frequency response
Frequency split
Gyroscopes
Materials elasticity
Mathematical analysis
MEMS gyroscope
Precision electrostatic tuning
Stiffness matrix
Tuning
title Electrostatic compensation of structural imperfections in dynamically amplified dual-mass gyroscope
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