Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target

Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target

The influence of the target operation mode on the chemical composition and crystalline structure of copper oxide films deposited onto a quartz glass substrate has been studied using Raman spectroscopy and X-ray phase analysis. The films have been synthesized in an Ar + O 2 gaseous environment using...

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Veröffentlicht in:Glass physics and chemistry 2016-07, Vol.42 (4), p.359-362
Hauptverfasser: Lapshin, A. E., Levitskii, V. S., Shapovalov, V. I., Komlev, A. E., Shutova, E. S., Myl’nikov, I. L., Komlev, A. A.
Format: Artikel
Sprache:eng
Schlagworte:
Ceramics
Characterization and Evaluation of Materials
Chemical composition
Chemistry and Materials Science
Composites
Copper
Copper oxides
Glass
Glass substrates
Magnetron sputtering
Magnetrons
Materials Science
Natural Materials
Organic chemistry
Oxide coatings
Physical Chemistry
Silica glass
Synthesis
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Zusammenfassung:The influence of the target operation mode on the chemical composition and crystalline structure of copper oxide films deposited onto a quartz glass substrate has been studied using Raman spectroscopy and X-ray phase analysis. The films have been synthesized in an Ar + O 2 gaseous environment using two identical magnetrons, differing only by the method of target cooling.
ISSN:1087-6596
1608-313X
DOI:10.1134/S108765961604009X