3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication

In this paper, 3D volumetric energy deposition and local crosslinking of hydrogen silsesquioxane (HSQ) are experimentally and numerically explored in focused helium ion beam lithography (HIBL). In particular, a through‐membrane exposure method is developed to make visible and subsequently to measure...

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Veröffentlicht in:	Advanced materials interfaces 2018-06, Vol.5 (12), p.n/a
Hauptverfasser:	Cai, Jingxuan, Zhu, Zhouyang, Alkemade, Paul F. A., van Veldhoven, Emile, Wang, Qianjin, Ge, Haixiong, Rodrigues, Sean P., Cai, Wenshan, Li, Wen‐Di
Format:	Artikel
Sprache:	eng
Schlagworte:	3D nanofabrication Computer simulation Crosslinking Deposition Energy distribution Flux density focused helium ion beam lithography Helium ions hydrogen silsesquioxane Ion beams Lithography localized volumetric energy deposition Mathematical models Modelling Nanofabrication Point spread functions Spatial distribution
Online-Zugang:	Volltext
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