Electrode structure of a compact microwave driven capacitively coupled atomic beam source
A compact magnetic field free atomic beam source was designed, assembled and tested the performance to produce hydrogen and nitrogen atoms. A forced air-cooled solid-state microwave power supply at 2.45 GHz frequency drives the source up to 100 W through a coaxial transmission cable coupled to a tri...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2018-01, Vol.57 (1S), p.1 |
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| container_title | Japanese Journal of Applied Physics |
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| creator | Shimabukuro, Yuji Takahashi, Hidenori Wada, Motoi |
| description | A compact magnetic field free atomic beam source was designed, assembled and tested the performance to produce hydrogen and nitrogen atoms. A forced air-cooled solid-state microwave power supply at 2.45 GHz frequency drives the source up to 100 W through a coaxial transmission cable coupled to a triple stub tuner for realizing a proper matching condition to the discharge load. The discharge structure of the source affected the range of operation pressure, and the pressure was reduced by four orders of magnitude through improving the electrode geometry to enhance the local electric field intensity. Optical emission spectra of the produced plasmas indicate production of hydrogen and nitrogen atoms, while the flux intensity of excited nitrogen atoms monitored by a surface ionization type detector showed the signal level close to a source developed for molecular beam epitaxy applications with 500 W RF power. |
| doi_str_mv | 10.7567/JJAP.57.01AA02 |
| format | Article |
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A forced air-cooled solid-state microwave power supply at 2.45 GHz frequency drives the source up to 100 W through a coaxial transmission cable coupled to a triple stub tuner for realizing a proper matching condition to the discharge load. The discharge structure of the source affected the range of operation pressure, and the pressure was reduced by four orders of magnitude through improving the electrode geometry to enhance the local electric field intensity. Optical emission spectra of the produced plasmas indicate production of hydrogen and nitrogen atoms, while the flux intensity of excited nitrogen atoms monitored by a surface ionization type detector showed the signal level close to a source developed for molecular beam epitaxy applications with 500 W RF power.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.7567/JJAP.57.01AA02</identifier><identifier>CODEN: JJAPB6</identifier><language>eng</language><publisher>Tokyo: The Japan Society of Applied Physics</publisher><subject>Atomic beams ; Atomic structure ; Coaxial cables ; Electrodes ; Emission spectra ; Hydrogen production ; Ionization ; Molecular beam epitaxy ; Molecular beams ; Molecular chains ; Nitrogen ; Nitrogen atoms ; Plasma ; Plasmas ; Power supplies ; Surface ionization</subject><ispartof>Japanese Journal of Applied Physics, 2018-01, Vol.57 (1S), p.1</ispartof><rights>2018 The Japan Society of Applied Physics</rights><rights>Copyright Japanese Journal of Applied Physics Jan 2018</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c402t-3dc854498f1d338826f0269dc5fb0c8f1787f0cb90ffe3c2ac20433ffee10e6c3</citedby><cites>FETCH-LOGICAL-c402t-3dc854498f1d338826f0269dc5fb0c8f1787f0cb90ffe3c2ac20433ffee10e6c3</cites><orcidid>0000-0003-4090-3995</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.7567/JJAP.57.01AA02/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53846,53893</link.rule.ids></links><search><creatorcontrib>Shimabukuro, Yuji</creatorcontrib><creatorcontrib>Takahashi, Hidenori</creatorcontrib><creatorcontrib>Wada, Motoi</creatorcontrib><title>Electrode structure of a compact microwave driven capacitively coupled atomic beam source</title><title>Japanese Journal of Applied Physics</title><addtitle>Jpn. 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Optical emission spectra of the produced plasmas indicate production of hydrogen and nitrogen atoms, while the flux intensity of excited nitrogen atoms monitored by a surface ionization type detector showed the signal level close to a source developed for molecular beam epitaxy applications with 500 W RF power.</description><subject>Atomic beams</subject><subject>Atomic structure</subject><subject>Coaxial cables</subject><subject>Electrodes</subject><subject>Emission spectra</subject><subject>Hydrogen production</subject><subject>Ionization</subject><subject>Molecular beam epitaxy</subject><subject>Molecular beams</subject><subject>Molecular chains</subject><subject>Nitrogen</subject><subject>Nitrogen atoms</subject><subject>Plasma</subject><subject>Plasmas</subject><subject>Power supplies</subject><subject>Surface ionization</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNp1kMtLxDAQxoMouK5ePQc8KbTm2cexLOtjWVBQD55CNk2gpd3UJF3Z_94sXfCip3nwm_lmPgCuMUpznuX3q1X1mvI8RbiqEDkBM0xZnjCU8VMwQ4jghJWEnIML79tYZpzhGfhcdloFZ2sNfXCjCqPT0BooobL9IFWAfaOc_ZY7DWvX7PQWKhn7TYh5t4_UOHS6hjLYCMKNlj30dnRKX4IzIzuvr45xDj4elu-Lp2T98vi8qNaJYoiEhNaq4IyVhcE1pUVBMhNvK2vFzQap2M2L3CC1KZExmioiFUGM0lhojHSm6BzcTHsHZ79G7YNoo_42SopIcspxybJIpRMVn_HeaSMG1_TS7QVG4mCfONgneC4m--LA3TTQ2OF347_w7R9w28rhAOG3IyeG2tAfoOF_Cw</recordid><startdate>20180101</startdate><enddate>20180101</enddate><creator>Shimabukuro, Yuji</creator><creator>Takahashi, Hidenori</creator><creator>Wada, Motoi</creator><general>The Japan Society of Applied Physics</general><general>Japanese Journal of Applied Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-4090-3995</orcidid></search><sort><creationdate>20180101</creationdate><title>Electrode structure of a compact microwave driven capacitively coupled atomic beam source</title><author>Shimabukuro, Yuji ; Takahashi, Hidenori ; Wada, Motoi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c402t-3dc854498f1d338826f0269dc5fb0c8f1787f0cb90ffe3c2ac20433ffee10e6c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Atomic beams</topic><topic>Atomic structure</topic><topic>Coaxial cables</topic><topic>Electrodes</topic><topic>Emission spectra</topic><topic>Hydrogen production</topic><topic>Ionization</topic><topic>Molecular beam epitaxy</topic><topic>Molecular beams</topic><topic>Molecular chains</topic><topic>Nitrogen</topic><topic>Nitrogen atoms</topic><topic>Plasma</topic><topic>Plasmas</topic><topic>Power supplies</topic><topic>Surface ionization</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shimabukuro, Yuji</creatorcontrib><creatorcontrib>Takahashi, Hidenori</creatorcontrib><creatorcontrib>Wada, Motoi</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shimabukuro, Yuji</au><au>Takahashi, Hidenori</au><au>Wada, Motoi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electrode structure of a compact microwave driven capacitively coupled atomic beam source</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><addtitle>Jpn. J. Appl. Phys</addtitle><date>2018-01-01</date><risdate>2018</risdate><volume>57</volume><issue>1S</issue><spage>1</spage><pages>1-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPB6</coden><abstract>A compact magnetic field free atomic beam source was designed, assembled and tested the performance to produce hydrogen and nitrogen atoms. A forced air-cooled solid-state microwave power supply at 2.45 GHz frequency drives the source up to 100 W through a coaxial transmission cable coupled to a triple stub tuner for realizing a proper matching condition to the discharge load. The discharge structure of the source affected the range of operation pressure, and the pressure was reduced by four orders of magnitude through improving the electrode geometry to enhance the local electric field intensity. 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| ispartof | Japanese Journal of Applied Physics, 2018-01, Vol.57 (1S), p.1 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_proquest_journals_2045351946 |
| source | Institute of Physics Journals |
| subjects | Atomic beams Atomic structure Coaxial cables Electrodes Emission spectra Hydrogen production Ionization Molecular beam epitaxy Molecular beams Molecular chains Nitrogen Nitrogen atoms Plasma Plasmas Power supplies Surface ionization |
| title | Electrode structure of a compact microwave driven capacitively coupled atomic beam source |
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