Laser Nano-Structuring of Pre-Structured Substrates
Laser nano-structuring of pre-structured Ni substrate using short and ultra-short laser pulses is experimentally studied. Prestructured samples were prepared using electron beam lithography with final periodic relief with period 300 -500 nm and sinusoidal profile. The morphology of laser-produced na...
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| Veröffentlicht in: | Journal of laser micro nanoengineering 2018-04, Vol.13 (1), p.6-9 |
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| container_title | Journal of laser micro nanoengineering |
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| creator | Barmina, E.V Skoulas, E Stratakis, E Shafeev, G.A |
| description | Laser nano-structuring of pre-structured Ni substrate using short and ultra-short laser pulses is experimentally studied. Prestructured samples were prepared using electron beam lithography with final periodic relief with period 300 -500 nm and sinusoidal profile. The morphology of laser-produced nanostructures strongly depends on the respective orientation of prestructured grating and polarization vector of the laser beam. Surface Electromagnetic Waves induced in Ni substrate that interfere with laser beam are strongly dumped if the polarization vector of laser light is perpendicular to the initial e-beam grating. The morphology of laser-produced nanostructures also depends on the laser fluence of the substrate. Laser nanostructuring of Ni using a phase plate in the laser beam results in very specific morphology of the irradiated surface. Keywords: laser ablation, LIPSS, nanostructures, surface electromagnetic waves |
| doi_str_mv | 10.2961/jlmn.2018.01.0002 |
| format | Article |
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Prestructured samples were prepared using electron beam lithography with final periodic relief with period 300 -500 nm and sinusoidal profile. The morphology of laser-produced nanostructures strongly depends on the respective orientation of prestructured grating and polarization vector of the laser beam. Surface Electromagnetic Waves induced in Ni substrate that interfere with laser beam are strongly dumped if the polarization vector of laser light is perpendicular to the initial e-beam grating. The morphology of laser-produced nanostructures also depends on the laser fluence of the substrate. Laser nanostructuring of Ni using a phase plate in the laser beam results in very specific morphology of the irradiated surface. 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Prestructured samples were prepared using electron beam lithography with final periodic relief with period 300 -500 nm and sinusoidal profile. The morphology of laser-produced nanostructures strongly depends on the respective orientation of prestructured grating and polarization vector of the laser beam. Surface Electromagnetic Waves induced in Ni substrate that interfere with laser beam are strongly dumped if the polarization vector of laser light is perpendicular to the initial e-beam grating. The morphology of laser-produced nanostructures also depends on the laser fluence of the substrate. Laser nanostructuring of Ni using a phase plate in the laser beam results in very specific morphology of the irradiated surface. Keywords: laser ablation, LIPSS, nanostructures, surface electromagnetic waves</description><subject>Analysis</subject><subject>Electromagnetic radiation</subject><subject>Electron beam lithography</subject><subject>Laser beams</subject><subject>Lasers</subject><subject>Morphology</subject><subject>Nanostructure</subject><subject>Nanotechnology</subject><subject>Phase plates</subject><subject>Plates (structural members)</subject><subject>Polarization</subject><subject>Propagation</subject><subject>Properties</subject><subject>Semiconductor wafers</subject><subject>Substrates</subject><issn>1880-0688</issn><issn>1880-0688</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNpNkE9rwzAMxc3YYKXrB9gtsHMyybET51jK_kHYBt3OxnHkktLGnZ0c9u2X0DGGDhKP9yTxY-wWIeNVgff7w7HPOKDKADMA4BdsgUpBCoVSl__ma7aKcT85QCmJJV-wvDaRQvJqep9uhzDaYQxdv0u8S94D_UnUJtuxiUMwA8UbduXMIdLqty_Z5-PDx-Y5rd-eXjbrOrUCYUgb6wQ66xrTgARri4YaU5FsjRICFKKxDQG2VPK2xUqSBSsFSlRQSCeqfMnuzntPwX-NFAe992Pop5Oag4ByXiImV3Z27cyBdNc7P31pp2rp2Fnfk-smfS1FxXle8mIK4Dlgg48xkNOn0B1N-NYIeuapZ5565qkB9cwz_wHFoGiZ</recordid><startdate>20180401</startdate><enddate>20180401</enddate><creator>Barmina, E.V</creator><creator>Skoulas, E</creator><creator>Stratakis, E</creator><creator>Shafeev, G.A</creator><general>Japan Laser Processing Society</general><general>Reza Netsu Kako Kenkyukai</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>BVBZV</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>P5Z</scope><scope>P62</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20180401</creationdate><title>Laser Nano-Structuring of Pre-Structured Substrates</title><author>Barmina, E.V ; Skoulas, E ; Stratakis, E ; Shafeev, G.A</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c410t-bcf41fcfbab050cc6beba9e5da8440811acbe01de72dd195ec0c541518065f493</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Analysis</topic><topic>Electromagnetic radiation</topic><topic>Electron beam lithography</topic><topic>Laser beams</topic><topic>Lasers</topic><topic>Morphology</topic><topic>Nanostructure</topic><topic>Nanotechnology</topic><topic>Phase plates</topic><topic>Plates (structural members)</topic><topic>Polarization</topic><topic>Propagation</topic><topic>Properties</topic><topic>Semiconductor wafers</topic><topic>Substrates</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Barmina, E.V</creatorcontrib><creatorcontrib>Skoulas, E</creatorcontrib><creatorcontrib>Stratakis, E</creatorcontrib><creatorcontrib>Shafeev, G.A</creatorcontrib><collection>CrossRef</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies & Aerospace Collection</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>East & South Asia Database</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Science Database</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Advanced Technologies & Aerospace Database</collection><collection>ProQuest Advanced Technologies & Aerospace Collection</collection><collection>Materials Science Collection</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><jtitle>Journal of laser micro nanoengineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Barmina, E.V</au><au>Skoulas, E</au><au>Stratakis, E</au><au>Shafeev, G.A</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Laser Nano-Structuring of Pre-Structured Substrates</atitle><jtitle>Journal of laser micro nanoengineering</jtitle><date>2018-04-01</date><risdate>2018</risdate><volume>13</volume><issue>1</issue><spage>6</spage><epage>9</epage><pages>6-9</pages><issn>1880-0688</issn><eissn>1880-0688</eissn><abstract>Laser nano-structuring of pre-structured Ni substrate using short and ultra-short laser pulses is experimentally studied. Prestructured samples were prepared using electron beam lithography with final periodic relief with period 300 -500 nm and sinusoidal profile. The morphology of laser-produced nanostructures strongly depends on the respective orientation of prestructured grating and polarization vector of the laser beam. Surface Electromagnetic Waves induced in Ni substrate that interfere with laser beam are strongly dumped if the polarization vector of laser light is perpendicular to the initial e-beam grating. The morphology of laser-produced nanostructures also depends on the laser fluence of the substrate. Laser nanostructuring of Ni using a phase plate in the laser beam results in very specific morphology of the irradiated surface. Keywords: laser ablation, LIPSS, nanostructures, surface electromagnetic waves</abstract><cop>Ibaraki</cop><pub>Japan Laser Processing Society</pub><doi>10.2961/jlmn.2018.01.0002</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
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| identifier | ISSN: 1880-0688 |
| ispartof | Journal of laser micro nanoengineering, 2018-04, Vol.13 (1), p.6-9 |
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| language | eng |
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| source | Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals |
| subjects | Analysis Electromagnetic radiation Electron beam lithography Laser beams Lasers Morphology Nanostructure Nanotechnology Phase plates Plates (structural members) Polarization Propagation Properties Semiconductor wafers Substrates |
| title | Laser Nano-Structuring of Pre-Structured Substrates |
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